Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
1071-1023
Journal Information
Category
Publisher
American Institute of Physics
Research Field
Publication Trends
Journal Stats Detail
Publications by article type
11.8k Publications
Citations by article type
212k Citations
Publications | Citations | |
|---|---|---|
| All | 11.8k | 212k |
| Original | 11.5k | 199k |
| Review | 130 | 11.9k |
| Others | 164 | 1,217 |
Top 10 Affiliations by Publication
Publications · 2020-2024
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Notes
History