information about Atomic layer deposition field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 33.6M papers | Chemistry 29.4M papers | Materials science 19M papers | Quantum mechanics 13.6M papers |
Organic chemistry 13.1M papers | Composite material 8.9M papers | Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers |
Thin film 517k papers | |||
Current | |||
Atomic layer deposition 22.4k papers | |||
Child | |||
Atomic layer epitaxy 1,894 papers |
Trends
Notes
History