information about Atomic layer deposition field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Physics 33M papers | Chemistry 28.9M papers | Materials science 18.5M papers | Quantum mechanics 13.3M papers |
Organic chemistry 12.9M papers | Composite material 8.7M papers | Nanotechnology 4.1M papers | Layer (electronics) 1.4M papers |
Thin film 509k papers | |||
| Current | |||
Atomic layer deposition 21.8k papers | |||
| Child | |||
Atomic layer epitaxy 1,877 papers | |||
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History