information about Capacitively coupled plasma field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Physics 33M papers | Quantum mechanics 13.3M papers | Nuclear physics 2.1M papers | Plasma 692k papers |
Inductively coupled plasma 39.3k papers | |||
| Current | |||
Capacitively coupled plasma 1,380 papers | |||
| Child | |||
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