information about X-ray lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Medicine 49.4M papers | Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers |
Pathology 9.1M papers | Composite material 8.7M papers | Nanotechnology 4.1M papers | Alternative medicine 2.4M papers |
Layer (electronics) 1.4M papers | Fabrication 344k papers | ||
| Current | |||
X-ray lithography 5,391 papers | |||
| Child | |||
Computational lithography 1,974 papers | Stencil lithography 1,654 papers | ||
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History