information about Plasma-immersion ion implantation field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 33M papers | Chemistry 28.9M papers | Quantum mechanics 13.3M papers | Organic chemistry 12.9M papers |
Ion 1.5M papers | Ion implantation 35k papers | ||
Current | |||
Plasma-immersion ion implantation 2,341 papers | |||
Child |
Trends
Notes
History