information about Multiple patterning field
Field Hierarchy
Parent | |||
---|---|---|---|
Chemistry 29.2M papers | Materials science 18.9M papers | Organic chemistry 13.1M papers | Composite material 8.9M papers |
Nanotechnology 4.4M papers | Layer (electronics) 1.4M papers | Resist 50.9k papers | |
Current | |||
Multiple patterning 3,497 papers | |||
Child | |||
Computational lithography 2,007 papers |
Trends