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Multiple patterning

https://www.wikidata.org/wiki/Q1917460

Field Hierarchy

Parent
Chemistry 29.1M papers	Materials science 18.8M papers	Organic chemistry 13.1M papers	Composite material 8.9M papers
Nanotechnology 4.3M papers	Layer (electronics) 1.4M papers	Resist 50.7k papers
Current
Multiple patterning 3,493 papers
Child
Computational lithography 2,004 papers

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History