information about Dry etching field
Field Hierarchy
Parent | |||
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Chemistry 29.1M papers | Materials science 18.8M papers | Organic chemistry 13.1M papers | Composite material 8.9M papers |
Nanotechnology 4.3M papers | Layer (electronics) 1.4M papers | Etching (microfabrication) 97.9k papers | |
Current | |||
Dry etching 10.3k papers | |||
Child |
Trends