information about Deep reactive-ion etching field

Deep reactive-ion etching

https://www.wikidata.org/wiki/Q486936
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Parent
Chemistry
28.9M papers
Materials science
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Organic chemistry
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Composite material
8.7M papers
Nanotechnology
4.1M papers
Layer (electronics)
1.4M papers
Etching (microfabrication)
97.4k papers
Reactive-ion etching
18.4k papers
Current
Deep reactive-ion etching
3,202 papers
Child
Trends