Fluidized bed chemical vapor deposition of pyrolytic carbon-III. Relationship between microstructure and mechanical properties

Pyrolytic carbon (PyC) coatings with different densities were produced by fluidized bed chemical vapor deposition under different deposition conditions. Their Young’s modulus and hardness were measured by nano-indentation, whereas the deformation behavior was studied through analyzing the force–displacement curves of the indentations. The deformation mechanism of PyC under indentation is attributed to the slip of the graphene planes, and its...