Wafer

Open quantum system

Resist

Quantum computer

Electron-beam lithography

Lithography

Quantum mechanics

Semiconductor

Optoelectronics

Coherence (philosophical gambling strategy)

Quantum dot

Nanotechnology

Quantum technology

Qubit

Layer (electronics)

Semiconductor device fabrication

Quantum

Materials science

Physics

Engineering physics

Nature Electronics

Full-scale quantum computers require the integration of millions of quantum bits. The promise of leveraging industrial semiconductor manufacturing to meet this requirement has fueled the pursuit of quantum computing in silicon quantum dots. However, to date, their fabrication has relied on electron-beam lithography and, with few exceptions, on academic style lift-off processes. Although these fabrication techniques offer process flexibility, they suffer from low yield and poor uniformity. An important question is whether the processing conditions developed in the manufacturing fab environment to enable high yield, throughput, and uniformity of transistors are suitable for quantum dot arrays and do not compromise the delicate qubit properties. Here, we demonstrate quantum dots hosted at a 28Si/28SiO2 interface, fabricated in a 300 mm semiconductor manufacturing facility using all-optical lithography and fully industrial processing. As a result, we achieve nanoscale gate patterns with remarkable homogeneity. Th...

Qubits made by advanced semiconductor manufacturing