Rapid quantitative analysis and optical properties of ZCTO thin films based on picosecond laser-induced breakdown spectroscopy

The target element concentration ratios of Zn–Cr–Sn–O(ZCTO) thin films with different sputtering parameters prepared by radio frequency (RF) magnetron sputtering were analyzed by picosecond laser-induced breakdown spectroscopy (PS-LIBS). PS-LIBS method was employed to measure the thickness of the thin film in the depth profile of the ZCTO sample. The measured value of PS-LIBS is 372 ± 53 nm, presenting a small error with the actual value. The...