Effect of surface oxidation on soft x-ray optical properties of ion beam sputter deposited amorphous AlN thin film
Abstract
In the present study, structural and compositional analyses of reactive ion beam sputter deposited aluminum nitride (AlN) thin film of thickness 100 Å are carried out using x-ray reflectivity and x-ray photoelectron spectroscopy techniques. Soft x-ray optical response of the film is derived from energy dependent soft x-ray reflectivity measurements performed in photon energy region of 380–1700 eV. Optical constants (δ and β) obtained from the...
Paper Details
Title
Effect of surface oxidation on soft x-ray optical properties of ion beam sputter deposited amorphous AlN thin film
Published Date
Nov 21, 2021
Journal
Volume
130
Issue
19
Pages
195302 - 195302
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