Effect of surface oxidation on soft x-ray optical properties of ion beam sputter deposited amorphous AlN thin film

Volume: 130, Issue: 19, Pages: 195302 - 195302
Published: Nov 21, 2021
Abstract
In the present study, structural and compositional analyses of reactive ion beam sputter deposited aluminum nitride (AlN) thin film of thickness 100 Å are carried out using x-ray reflectivity and x-ray photoelectron spectroscopy techniques. Soft x-ray optical response of the film is derived from energy dependent soft x-ray reflectivity measurements performed in photon energy region of 380–1700 eV. Optical constants (δ and β) obtained from the...
Paper Details
Title
Effect of surface oxidation on soft x-ray optical properties of ion beam sputter deposited amorphous AlN thin film
Published Date
Nov 21, 2021
Volume
130
Issue
19
Pages
195302 - 195302
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