Fabrication and characterization of ZnO/Zn2TiO4/ZnAl2O4 composite films by using magnetron sputtering with ceramic targets

Transparent conducting oxides (TCO), including ZnO/Zn2TiO4/ZnAl2O4 composite films, are of considerable importance in optoelectronic applications. We fabricated composite film assisted with DC magnetron sputtering using ceramic target material (ZnO, TiO2, and Al2O3 powders mixture). The influence of processing gases composition (0–50% O2–Ar) on film characteristics, including structural, optical, and electronic properties, is assessed. All films...