Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

In the presented work, a model of a microelectromechanical accelerometer with two microbeam sensing elements located between two fixed electrodes is proposed. The action of the inertia forces in the longitudinal direction affects the spectral properties of the system. The dynamics of the system in the presence of a weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization - a significant...