Optical inspection of the silicon micro-strip sensors for the CBM experiment employing artificial intelligence
Volume: 1021, Pages: 165932 - 165932
Published: Jan 1, 2022
Abstract
Optical inspection of 1191 silicon micro-strip sensors was performed using a custom made optical inspection setup, employing a machine-learning based approach for the defect analysis and subsequent quality assurance. Furthermore, metrological control of the sensor's surface was performed. In this manuscript, we present the analysis of various sensor surface defects. Among these are implant breaks, p-stop breaks, aluminium strip opens, aluminium...
Paper Details
Title
Optical inspection of the silicon micro-strip sensors for the CBM experiment employing artificial intelligence
Published Date
Jan 1, 2022
Volume
1021
Pages
165932 - 165932
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