Experimental investigation of structural, wetting, mechanical and Tribological properties of TiZrN thin films deposited by magnetron sputtering

-TiZrN thin films were deposited on Si (100) wafers and XC100 steel substrates by reactive R.f. magnetron sputtering using titanium and zirconium targets in an Ar-N2 mixture atmosphere to evaluate the effect of varying Zr content (0 to 22.2 at.%), on the film structure, surface wettability, hardness and wear resistance. The presence of different phases such as TiN, ZrN, and ZrO2 were confirmed by XRD analysis. Results showed that, the lattice...