Dynamic white-light interferometry via multiwavelength tilt iteration and sliding local least squares

The growing interest in microprofile measurements for advanced semiconductor manufacturing and electronic glass screens has stimulated the demand for in situ dynamic white-light interferometry (DWLI). However, it is challenging to perform vibration-insensitive measurements because of the broad-spectrum interference. In this Letter, we report a vertical scanning DWLI using multiwavelength tilt iteration and sliding local least squares. Numerical...