Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry
Abstract
The gas cluster ion beam (GCIB) is a valuable tool for surface analysis, providing new 3D mass analysis equipment possibilities. The main feature of the GCIB is that many particles are involved during the collision of the cluster ion beam with a sample surface. Studying the characteristics of the GCIB is essential for improving the performance of the analysis equipment. We evaluated the efficiency of the GCIB using a mixed-gas of Ar and CO2 as a...
Paper Details
Title
Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry
Published Date
Jan 1, 2022
Journal
Volume
572
Pages
151467 - 151467
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