Top-down convergence of near-infrared photonics with silicon substrate-integrated electronics

Optica10.40
Volume: 8, Issue: 11, Pages: 1363 - 1363
Published: Oct 22, 2021
Abstract
On-chip direct coupling of dielectric waveguides to Si substrate-integrated photodetectors has been realized within a top-down approach. A first-run 44% external quantum efficiency at 850 nm is shown for an oxynitride photonic integrated circuit at room...
Paper Details
Title
Top-down convergence of near-infrared photonics with silicon substrate-integrated electronics
Published Date
Oct 22, 2021
Journal
Volume
8
Issue
11
Pages
1363 - 1363
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