Role of hydrogen and oxygen in the study of substrate surface impurities and defects in the chemical vapor deposition of graphene

Carbon10.90
Volume: 185, Pages: 82 - 95
Published: Nov 1, 2021
Abstract
Large-area and high-quality graphene grown on metal by chemical vapor deposition (CVD) has great potential applications in electronics and photo electronics. After more than 10 years of development, great progress has been made in the growth of graphene, and the role of various factors in the growth of graphene has been gradually clear. In this review, the role of hydrogen and oxygen in the formation and elimination of carbon-based impurities...
Paper Details
Title
Role of hydrogen and oxygen in the study of substrate surface impurities and defects in the chemical vapor deposition of graphene
Published Date
Nov 1, 2021
Journal
Volume
185
Pages
82 - 95
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