Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
Volume: 144, Issue: 4
Published: Oct 19, 2021
Abstract
Subsurface damage that is caused by mechanical machining is a major impediment to the widespread use of hard–brittle materials. Ultrasonic vibration-assisted macro- or micromachining could facilitate shallow subsurface damage compared with conventional machining. However, the subsurface damage that was induced by ultrasonic vibration-assisted nanomachining on hard–brittle silicon crystal has not yet been thoroughly investigated. In this study,...
Paper Details
Title
Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
Published Date
Oct 19, 2021
Volume
144
Issue
4
Citation AnalysisPro
You’ll need to upgrade your plan to Pro
Looking to understand the true influence of a researcher’s work across journals & affiliations?
- Scinapse’s Top 10 Citation Journals & Affiliations graph reveals the quality and authenticity of citations received by a paper.
- Discover whether citations have been inflated due to self-citations, or if citations include institutional bias.
Notes
History