Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Abstract
Subsurface damage that is caused by mechanical machining is a major impediment to the widespread use of hard–brittle materials. Ultrasonic vibration-assisted macro- or micromachining could facilitate shallow subsurface damage compared with conventional machining. However, the subsurface damage that was induced by ultrasonic vibration-assisted nanomachining on hard–brittle silicon crystal has not yet been thoroughly investigated. In this study,...
Paper Details
Title
Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
Published Date
Oct 19, 2021
Volume
144
Issue
4
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