All-optical dynamic analysis of the photothermal and photoacoustic response of a microcantilever by laser Doppler vibrometry

Light absorption induced thermoelastic and photoacoustic excitation, combined with laser Doppler vibrometry, was utilized to analyze the dynamic mechanical behavior of a microcantilever. The measured frequency response, modal shapes, and acoustic coupling effects were interpreted in the framework of a simple Bernouilli-Euler model and quantitative 3D finite element method (FEM) analysis. Three opto-mechanical generation mechanisms, each...