Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films

Structural and tribo-mechanical properties of Zr-O-N films deposited by reactive magnetron sputtering in a mixture of Ar (flow rate = 80 sccm), N2 (flow rate = 20 sccm) and O2 with a varying flow rate of 0 to 12 sccm were investigated. The films were characterized using scanning electron microscopy, energy dispersive x-ray analysis, atomic force microscopy, nanoindentation and wear tests. Oxygen content have a significant effect on the...