Thermal stability of grain structure for Ag nanotwinned films sputtered with substrate bias

In this study, different grain growth paths after aging at various temperatures for 1 h were observed in Ag nanotwinned thin films with and without substrate bias voltage, which led to large differences in thermal stability. As-deposited Ag nanotwinned thin films with and without substrate bias voltage were characterized by FIB, EBSD, and TEM, which revealed thinner equiaxial fine-grained regions, higher amounts of (111)-oriented grains and...