Status review of the science and technology of PZT/diamond heterostructures and their applications

Volume: 36, Issue: 23, Pages: 4725 - 4745
Published: Aug 24, 2021
Abstract
Diamond has been forecasted as an excellent substrate material for acoustic devices and microelectromechanical systems owing to its exceptional mechanical and acoustic properties. The integration of piezoelectric thin films on diamond can realize devices operating in the GHz frequency range, which has great relevance in the 5G communication systems. The heterostructures, based on lead zirconate titanate (PZT) and diamond, could be highly...
Paper Details
Title
Status review of the science and technology of PZT/diamond heterostructures and their applications
Published Date
Aug 24, 2021
Volume
36
Issue
23
Pages
4725 - 4745
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