Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope

In this study, nanoscratch experiments using side-forward multiple scans by friction force microscope with triangular pyramidal monocrystalline diamond tip were conducted on a (0001) plane sapphire wafer substrate to clarify the ductile-regime machining mechanism including its anisotropy. Various characteristics, such as scratch force, depth and specific energy for each scratch direction on C-plane of sapphire, were manifested by a friction...