Simultaneous determination of the mass and position of attached particles using a micro-beam resonant mass sensor with axial pre-tension

Volume: 232, Issue: 10, Pages: 1 - 19
Published: Aug 10, 2021
Abstract
In this work, we present a method to simultaneously detect the mass and the position of an attached microparticle using a bridge-type micro-beam resonant mass sensor under axial pre-tension. Simultaneous detection of the mass and the position is innovatively enabled by deliberately varying the axial pre-tension, utilizing only the fundamental frequency. As an important dissipation mechanism, thermoelastic damping (TED) in micro-/nano-resonators...
Paper Details
Title
Simultaneous determination of the mass and position of attached particles using a micro-beam resonant mass sensor with axial pre-tension
Published Date
Aug 10, 2021
Volume
232
Issue
10
Pages
1 - 19
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