Thermal Stability of Grain Structure for Ag Nanotwinned Films Sputtered With Substrate Bias

In this study, different grain growth paths after aging at various temperatures for 1 hour were observed in Ag nanotwinned thin films with and without substrate bias, which led to large differences in thermal stability. As-deposited Ag nanotwinned thin films with and without substrate bias were characterized by FIB, EBSD, and TEM, which revealed thinner equiaxial fine-grained regions, higher amounts of (111)-oriented grains and denser nanotwin...