Correlating point defects with mechanical properties in nanocrystalline TiN thin films

Defects significantly affect the mechanical properties of materials. However, quantitatively correlating the point defects with mechanical property could be a challenge. In this study, we explore the point defect effects on the structure and property of magnetron sputtered TiN nanocrystalline films (synthesized using different negative bias potential) via a combination of analytical techniques and density functional theory (DFT) calculations. We...