Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

Published: Jan 1, 2022
Abstract
This work discusses an extension to conventional low-coherence interferometry by the introduction of dispersion-encoding. The extension facilitates the measurement of surface height profiles with sub-nm resolution. The selection of a dispersive element for encoding allows for tuning of the axial measurement range and resolution of the setup. The approach is theoretically designed and implemented for applications such as surface profilometry, the...
Paper Details
Title
Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
Published Date
Jan 1, 2022
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