Microscopic evidence of strong interactions between chemical vapor deposited 2D MoS2 film and SiO2 growth template

Volume: 8, Issue: 1
Published: Apr 9, 2021
Abstract
Two-dimensional MoS 2 film can grow on oxide substrates including Al 2 O 3 and SiO 2 . However, it cannot grow usually on non-oxide substrates such as a bare Si wafer using chemical vapor deposition. To address this issue, we prepared as-synthesized and transferred MoS 2 (AS-MoS 2 and TR-MoS 2 ) films on SiO 2 /Si substrates and studied the effect of the SiO 2 layer on the atomic and electronic structure of the MoS 2 films using spherical...
Paper Details
Title
Microscopic evidence of strong interactions between chemical vapor deposited 2D MoS2 film and SiO2 growth template
Published Date
Apr 9, 2021
Volume
8
Issue
1
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