Design, modeling, and control of a monolithic compliant x-y-θ microstage using a double-rocker mechanism

This paper reports the design, modeling, and control of a novel three-degrees-of-freedom piezoelectric compliant microstage by introducing a new double-rocker mechanism. The double-rocker mechanism combines a first (leverage) amplifier and a second (rocker) amplifier for double-stage displacement amplification and parasitic motion reduction. An analytical model is established to calculate the deformation behavior of the microstage, and the model...