Investigation of mass transfer inside micro structures and its effect on replication accuracy in precision micro electroforming

Volume: 165, Pages: 103717 - 103717
Published: Jun 1, 2021
Abstract
Micro electroforming is a promising electrodeposition-based precision replication technique for the fabrication of microstructured moulds. In this process, a poor mass transfer inside the micro structure with a high aspect ratio significantly affects the replication accuracy of the mould. In this paper, a novel star pattern with a continuously changing line width in the range of 20–320 μm, corresponding to a variable aspect ratio of 0.16–2.5,...
Paper Details
Title
Investigation of mass transfer inside micro structures and its effect on replication accuracy in precision micro electroforming
Published Date
Jun 1, 2021
Volume
165
Pages
103717 - 103717
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