Fatigue studies of CoCrFeMnNi high entropy alloy films using nanoindentation dynamic mechanical analyses

Films in the microelectromechanical systems are frequently subjected to the fatigue damage under cyclic loading, and the fatigue properties of the films greatly influence the reliability and life of MEMS. However, because of the small dimension of films, characterization of their fatigue properties is a daunting challenge. Nanoindentation dynamic mechanical analysis (DMA) provides a possible solution. However, the setting of loading cycles is...