Etching (microfabrication)

Surface pressure

Surface roughness

Optics

Physics

Composite material

Interferometry

Materials science

Layer (electronics)

Sapphire

Pressure sensor

Optoelectronics

Laser

Mechanics

Surface finish

Thermodynamics

Optics Express

In this paper, we proposed an all-sapphire-based extrinsic Fabry-Perot interferometer (EFPI) pressure sensor based on an optimized wet etching process, aiming to improve the quality of the interference signal. The sapphire pressure sensitive diaphragm (SPSD) was fabricated by wet etching solutions with different mixture ratios of H 3 PO 4 and H 2 SO 4 at 280°C. The differences of mixture ratios affect the surface roughness of SPSD. SPSDs with surface roughness of 3.91nm and 0.39nm are obtained when the mixture ratios of H 3 PO 4 and H 2 SO 4 is 1:1 and 1:3, respectively. We constructed pressure sensing test system adopting these two kinds of SPSD and performed comparative test. The experiment results show that the demodulation jump can be solved and cavity length fluctuation is decreased to ±5nm when the surface roughness of SPSD is 0.39nm.

All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching