Structural, optical and electrical characterization of ITO films co-doped with Molybdenum

In this paper we report a detailed investigation on the structural, electrical, and optical properties of Mo-doped ITO (ITMO) thin films. ITMO was deposited at room temperature by RF magnetron co-sputtering from ITO and Mo targets, and also thermal annealed up to 500 °C after the growth. The analyses revealed a high doping efficiency of the Mo already at room temperature. Moreover, a strong improvement of the electrical and optical properties is...