Time/Space-Separation-Based Gaussian Process Modeling for the Cross-Coupling Effect of a 2-DOF Nanopositioning Stage

Multiple-axis nanopositioning stages are widely used in nanotechnology, which suffer not only from hysteresis nonlinearity but also from cross-coupling effect. A vast body of literature has been proposed to model the hysteresis nonlinearity. However, few efforts have been made to describe the cross-coupling effect due to its complexity, and most of the presented works considered only the effect of the motion of the other axis from the aspect of...