Performance and local structure evolution of NbMoTaWV entropy-stabilized oxide thin films with variable oxygen content

Entropy-stabilized refractory metal oxide thin films have great application prospects in many fields due to their good preparation performance, excellent thermal stability, high hardness and abrasion resistance, and adjustable conductivity. In present paper, a series of (NbMoTaWV)100-xOx (x = 0–53.63) five-component entropy-stabilized oxide thin films were deposited on the single-crystal Si (100) substrates by radio frequency magnetron...