High-performance ethanol sensor based on In2O3 nanospheres grown on silicon nanoporous pillar array

At the interfaces between different materials, electronic systems with unusual electronic properties can be generated. Here, we report an In2O3/Si nanoheterostructures prepared by depositing indium grain film on silicon nanoporous pillar array (Si-NPA) by a vacuum thermal evaporation technique and a following thermal oxidation method. The composition and morphology of In2O3 film on Si-NPA were characterized by X-ray diffraction (XRD) and...