Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam
Abstract
Microbeams are key elements in most of the micro-electromechanical systems (MEMS). Electromechanical instability of microbeams in turn plays an important role in their applications. The shape and mechanical properties of microbeams dictate their functional characteristics. Focusing on their instability-based working mechanism, one can appreciate that viscoelasticity of MEMS materials cannot be neglected. Consequently, the analysis of instability...
Paper Details
Title
Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam
Published Date
Jul 9, 2020
Volume
2020
Pages
1 - 16
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