A Flexible Pressure Sensor With Sandwiched Carpets of Vertically Aligned Carbon Nanotubes Partially Embedded in Polydimethylsiloxane Substrates

This paper presents a flexible pressure sensor composed of two face-to-face electrodes of vertically aligned carbon nanotubes (VACNTs) carpets partially embedded in polydimethylsiloxane(PDMS) substrates. VACNTs were grown using atmospheric pressure chemical vapor deposition (APCVD) on a Si/SiO2 substrate and transferred onto PDMS for partial embedment. This unique synthesis permitted a rapid and facile integration of a flexible and stretchable...