Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning

Odd-harmonic repetitive control (ORC) has been successfully applied to improve the triangular trajectory tracking performance of nanopositioners. However, the conventional ORC tends to amplify the tracking errors at frequencies other than the odd-harmonic components, mainly the even harmonics of the fundamentals of the intended triangular trajectory to be tracked. Due to the influence from the hysteresis nonlinearity of the piezoelectric...