RF magnetron sputtered AlCoCrCu0.5FeNi high entropy alloy (HEA) thin films with tuned microstructure and chemical composition

Volume: 836, Pages: 155348 - 155348
Published: Sep 1, 2020
Abstract
High entropy alloy (HEA) thin films are extensively studied recently due to their propensity to display a combination of excellent properties such as high hardness, hydrophobicity, superior oxidation and corrosion resistance. Sputter deposition of thin films comprised of several elements typically requires the use of targets containing multiple elements, making both the stoichiometry and microstructure of the resulting films strongly dependent...
Paper Details
Title
RF magnetron sputtered AlCoCrCu0.5FeNi high entropy alloy (HEA) thin films with tuned microstructure and chemical composition
Published Date
Sep 1, 2020
Volume
836
Pages
155348 - 155348
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