A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation

This paper surveys the recent advances on the modeling and control of hysteresis of piezoelectric actuators (PTAs) in the context of high precision applications of atomic force microscopes (AFMs). The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable bandwidth and accuracy are discussed in detailed. Future challenges and the scope of possible research are presented to pave the way to video rate...