Electron beam processing

Irradiation

Optics

Physics

Electron

Beam (structure)

Nanotechnology

Nuclear physics

Thin film

Materials science

Sputtering

Scale (ratio)

Computer science

Scalability

Optoelectronics

Quantum mechanics

Photodiode

Database

Cathode ray

ACS Applied Materials & Interfaces

Two-dimensional molybdenum disulfide (MoS2) has emerged as a promising material for optoelectronic applications because of its superior electrical and optical properties. However, the difficulty in synthesizing large-scale MoS2 films has been recognized as a bottleneck in uniform and reproducible device fabrication and performance. Here, we proposed a radio-frequency magnetron sputter system, and post-treatments of electron beam irradiation and sulfurization to obtain large-scale continuous and high-quality multilayer MoS2 films. Large-area uniformity was confirmed by no deviation of electrical performance in fabricated MoS2 thin-film transistors (TFTs) with an average on/off ratio of 103 and a transconductance of 0.67 nS. Especially, the photoresponsivity of our MoS2 TFT reached 3.7 A W–1, which is a dramatic improvement over that of a previously reported multilayer MoS2 TFT (0.1 A W–1) because of the photogating effect induced by the formation of trap states in the band gap. Finally, we organized a 4 × 4 MoS2 phototransistor array with high photosensitivity, linearity, and uniformity for light detection, which demonstrates the great potential of 2D MoS2 for future-oriented optoelectronic devices.

Exceptionally Uniform and Scalable Multilayer MoS<sub>2</sub> Phototransistor Array Based on Large-Scale MoS<sub>2</sub> Grown by RF Sputtering, Electron Beam Irradiation, and Sulfurization

Exceptionally Uniform and Scalable Multilayer MoS2 Phototransistor Array Based on Large-Scale MoS2 Grown by RF Sputtering, Electron Beam Irradiation, and Sulfurization

Exceptionally Uniform and Scalable Multilayer MoS₂ Phototransistor Array Based on Large-Scale MoS₂ Grown by RF Sputtering, Electron Beam Irradiation, and Sulfurization