Signal Transformed Internal Model Control for Non-raster Scanning of Piezo-actuated Nanopositioning Stages

This paper proposes a new signal transformed internal model control (STIMC) scheme for non-raster scanning patterns of piezo-actuated nanopositioning stages. To smooth the scanning signals superimposed with a ramp or time-varying amplitudes, a signal transformation operator is calculated to convert the references into standard harmonic waveforms. An inverse transformation operator is then added in the control loop to generate the driving...