Thermoelastic damping in micromechanical circular plate resonators with radial pre-tension

Thermoelastic damping (TED) is one of the main energy dissipation mechanisms in micro/nano resonators and one of the major concerns in respect to performance of micro-electromechanical systems and nano-electromechanical systems devices. In this article, we report that application of pre-tension stress on micro/nano circular plate resonators not only increases the resonant frequency, but also reduces TED. Analytical expressions of TED in...