Experimental and analytical study on the superharmonic resonance of size-dependent cantilever microbeams

The superharmonic resonance (SR) of size-dependent cantilever microbeams is investigated experimentally and analytically. Nickel cantilever microbeams are employed with concentrated harmonic force on the tip. The SR of order two, three, four, five, and six are observed. The frequency–response curves (FRCs) near the SR frequencies as well as the time histories are obtained. The FRCs indicate that the superharmonic resonant frequencies are...