Evaluation of thermoelastic damping in micromechanical resonators with axial pretension: An analytical model accounting for two-dimensional thermal conduction
Abstract
It has been reported that application of tensile axial stress can simultaneously increase quality factor and resonant frequency for micromechanical resonators. In this study, we formulate an analytical model for evaluating thermoelastic damping in micromechanical resonators based on the thermal energy method, in which thermal conductions in both thickness direction and axial direction are considered. An explicit expression for thermoelastic...
Paper Details
Title
Evaluation of thermoelastic damping in micromechanical resonators with axial pretension: An analytical model accounting for two-dimensional thermal conduction
Published Date
Jun 25, 2019
Journal
Volume
42
Issue
9
Pages
1192 - 1205
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