Model reference adaptive damping control for a nanopositioning stage with load uncertainties

In this paper, a scheme of model reference adaptive integral resonant control (MRAIRC) is presented for adaptive precision motion control of a piezo-actuated nanopositioning platform. The major advantage of the proposed scheme lies in the adaptivity for dynamic changes resulting from load uncertainties. Existing standard integral resonant control (IRC) with constant controller gains is normally designed based on the identified system model under...